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Title Enabling technologies for MEMS and nanodevices [electronic resource] : advanced micro and nanosystems / edited by Henry Baltes ... [et al.].

Imprint

Weinheim [Germany] : Wiley, 2013.

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Available to Pittsburg State University patrons only.

Location	Call No.	OPAC Message	Status
Axe ProQuest E-Book	Electronic Book	---	Available

Description	xii, 427 p. : ill.
Bibliography	Includes bibliographical references and index.
Reproduction	Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.
Subject	Microelectronics.
	Nanotechnology.
	Microelectromechanical systems.
Genre/Form	Electronic books.
Added Author	Baltes, Henry.
	ProQuest (Firm)
ISBN	9783527334988
	9783527675043 (electronic bk.)