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Author Ree, Moonhor.

Title Low-k nanoporous interdielectrics [electronic resource] : materials, thin film fabrications, structures and properties / Moonhor Ree, Jinhwan Yoon and Kyuyoung Heo.

Imprint Hauppauge, N.Y. : Nova Science Publishers, c2010.

Copies

Location Call No. OPAC Message Status
 Axe ProQuest E-Book  Electronic Book    ---  Available
Description 67 p. : ill.
Series Nanotechnology science and technology
Nanotechnology science and technology series.
Bibliography Includes bibliographical references (p. [51]-61) and index.
Reproduction Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.
Subject Dielectric films.
Microelectronics -- Materials.
Porous materials.
Interconnects (Integrated circuit technology)
Genre/Form Electronic books.
Added Author Yoon, Jinhwan.
Heo, Kyuyoung.
ProQuest (Firm)
ISBN 9781616687496 (softcover)
9781617283185 (e-book)

 
    
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