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Author Sarkar, Jaydeep.

Title Sputtering materials for VLSI and thin film devices [electronic resource] / Jaydeep Sarkar.

Imprint Waltham, [Mass.] : William Andrew, 2014 (Norwood, Mass. : [generator])


Location Call No. OPAC Message Status
 Axe Engineering Pro E-Book  Electronic Book    ---  Available
Edition 1st ed.
System Details Mode of access: Internet via World Wide Web.
Note Title from title screen.
File Type Text.
Issued By Digitized and made available by:
Form Available also in a print ed.
Bibliography Includes bibliographical references and index.
Subject Integrated circuits -- Very large scale integration.
Thin film devices.
Thin films.
Microelectronics -- Materials.
Sputtering (Physics)
Genre/Form Electronic books.
Added Author Books24x7, Inc.
ISBN 9780815515937

Available items only