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Corporate Author National Research Council (U.S.). Panel on Plasma Processing of Materials.

Title Plasma processing of materials [electronic resource] : scientific opportunities and technological challenges / Panel on Plasma Processing of Materials, Plasma Science Committee, Board on Physics and Astronomy, Commission on Physical Sciences, Mathematics, and Applications, National Research Council.

Imprint Washington, D.C. : National Academy Press, 1991.


Location Call No. OPAC Message Status
 Axe ProQuest E-Book  Electronic Book    ---  Available
Description xii, 75 p. : ill.
Reproduction Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.
Subject Plasma engineering.
Microelectronics -- Materials -- Effect of radiation on.
Surfaces (Technology)
Genre/Form Electronic books.
Added Author ProQuest (Firm)
ISBN 0309045975

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