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Microelectromechanical Systems Measurement
1
E-Book/E-Doc
 

Digital holography for MEMS and microsystem metrology



Chichester, West Sussex, U.K. ; Hoboken, N.J. : Wiley, 2011. 2011

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Microelectromechanical Systems Reliability
2
E-Book/E-Doc
 

Reliability of MEMS testing of materials and devices



Weinheim : Wiley-VCH, 2013. 2013

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