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Title
Handbook of silicon based MEMS materials and technologies / edited by Markku Tilli [and five others] ; contributors, Timo Aalto [and ninety-three others].
Publication Info.
Amsterdam, [Netherlands] : William Andrew, 2015.
2015
Connect to
Available to Pittsburg State University patrons only.
Copies
Location
Call No.
OPAC Message
Status
Axe ProQuest E-Book
Electronic Book
---
Available
Edition
Second edition.
Description
1 online resource (827 pages) : illustrations (some color), photographs.
text rdacontent
computer rdamedia
online resource rdacarrier
Series
Micro & Nano Technologies Series
Micro & nano technologies.
Bibliography
Includes bibliographical references at the end of each chapters and index.
Note
Description based on print version record.
Subject
Microelectromechanical systems.
Microelectromechanical systems -- Materials.
Silicon -- Electric properties.
Genre/Form
Electronic books.
Added Author
Tilli, Markku, editor.
Aalto, Timo, contributor.
Other Form:
Print version: Handbook of silicon based MEMS materials and technologies. Second edition. Amsterdam, [Netherlands] : William Andrew, c2015 xxxvii, 787 pages Micro & nano technologies. 9780323299657 2015937707
ISBN
9780323299657
9780323312233 (electronic bk.)
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