| Edition |
Second edition. |
| Description |
1 online resource : illustrations |
|
text txt rdacontent |
|
computer c rdamedia |
|
online resource cr rdacarrier |
| Series |
Micro & nano technologies |
|
Micro & nano technologies.
|
| Bibliography |
Includes bibliographical references and index. |
| Summary |
The Handbook of Silicon Based MEMS Materials and Technologies, Second Edition, is a comprehensive guide to MEMS materials, technologies, and manufacturing that examines the state-of-the-art with a particular emphasis on silicon as the most important starting material used in MEMS. The book explains the fundamentals, properties (mechanical, electrostatic, optical, etc.), materials selection, preparation, manufacturing, processing, system integration, measurement, and materials characterization techniques, sensors, and multi-scale modeling methods of MEMS structures, silicon crystals, and wafers, also covering micromachining technologies in MEMS and encapsulation of MEMS components. Furthermore, it provides vital packaging technologies and process knowledge for silicon direct bonding, anodic bonding, glass frit bonding, and related techniques, shows how to protect devices from the environment, and provides tactics to decrease package size for a dramatic reduction in costs. |
| Note |
Title details screen (ScienceDirect, viewed September 9, 2015). |
| Subject |
Microelectromechanical systems.
|
|
Microelectromechanical systems -- Materials.
|
|
Silicon -- Electric properties.
|
|
Micro-Electrical-Mechanical Systems |
|
Microsystèmes électromécaniques.
|
|
Microsystèmes électromécaniques -- Matériaux.
|
|
TECHNOLOGY & ENGINEERING -- Mechanical.
|
|
Microelectromechanical systems
|
|
Microelectromechanical systems -- Materials
|
|
Silicon -- Electric properties
|
| Added Author |
Tilli, Markku, editor.
|
| Other Form: |
Print version: Handbook of silicon based MEMS materials and technologies. Second edition. Amsterdam, [Netherlands] : William Andrew, ©2015 xxxvii, 787 pages Micro & nano technologies. 9780323299657 |
| ISBN |
9780323312233 (electronic bk.) |
|
0323312233 (electronic bk.) |
|
0323299652 |
|
9780323299657 |
|
9780323299657 |
| Standard No. |
AU@ 000056988558 |
|
AU@ 000062548021 |
|
CHBIS 010528059 |
|
CHVBK 354096818 |
|
DEBSZ 45152912X |
|
DEBSZ 482376406 |
|
