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Corporate Author

National Research Council (U.S.). Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems.

Title Beam technologies for integrated processing [electronic resource] : report of the Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council.

Imprint

Washington, D.C. : National Academy Press, 1992.

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Available to Pittsburg State University patrons only.

Copies

Location	Call No.	OPAC Message	Status
Axe ProQuest E-Book	Electronic Book	---	Available

Description	xii, 89 p. : ill.
Note	"NMAB-461."
Bibliography	Includes bibliographical references.
Reproduction	Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.
Subject	Microelectronics industry.
	Molecular beams -- Industrial applications.
	Microelectronics -- Materials.
	Plasma-enhanced chemical vapor deposition -- Industrial applications.
Genre/Form	Electronic books.
Added Author	ProQuest (Firm)
ISBN	0309046351