Description |
1 online resource (1 volume) |
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text txt rdacontent |
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computer c rdamedia |
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online resource cr rdacarrier |
Series |
Micro and nano technologies series
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Summary |
This book focuses on the industrial perspective for micro- and nanofabrication methods including large-scale manufacturing, transfer of concepts from lab to factory, process tolerance, yield, robustness, and cost. It gives a history of miniaturization, micro- and nanofabrication, and surveys industrial fields of application, illustrating fabrication processes of relevant micro and nano devices. Concerning sub-micron feature manufacture, the book explains: the philosophy of micro/ nanofabrication for integrated circuit industry; thin film deposition; (waveguide, plastic, semiconductor) material processing; packaging; interconnects; stress (e.g., thin film residual); economic; and environmental aspects. Micro/nanomechanical sensors and actuators are explained in depth with information on applications, materials (incl. functional polymers), methods, testing, fabrication, integration, reliability, magnetic microstructures, etc. . Shows engineers & students how to evaluate the potential value of current and nearfuture manufacturing processes for miniaturized systems in industrial environments . Explains the top-down and bottom up approaches to nanotechnology, nanostructures fabricated with beams, nano imprinting methods, nanoparticle manufacturing (and their health aspects), nanofeature analysis, and connecting nano to micro to macro . Discusses issues for practical application cases; possibilities of dimension precision; large volume manufacturing of micro- & nanostructures (machines, materials, costs) . Explains applications of Microsystems for information technology, e.g.: data recording (camera, microphone), storage (memories, CDs), communication; computing; and displays (beamers, LCD, TFT) . Case studies are given for sensors, resonators, probes, transdermal medical systems, micro- pumps & valves, inkjets, DNA-analysis, lab-on-a-chip, & micro-cooling. |
Contents |
Microsystems technology; Nanotechnology; Microsystems for Information Technology; Micro and nanomechanical sensors and actuators; Sensors for chemical and medical applications; Microfluidic systems; Micro and nanotechnology for sustainable energy. |
Note |
Print version record. |
Subject |
Microfabrication.
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Nanotechnology.
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Microfabrication.
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Nanotechnologie.
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Microfabrication
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Nanotechnology
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Other Form: |
Print version: Luttge, Regina. Industrial micro & nano fabrication. Norwich, N.Y. : William Andrew ; Oxford : Elsevier Science [distributor], 2010 9780815515821 (OCoLC)651074593 |
ISBN |
9780815515821 (electronic bk.) |
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0815515820 (electronic bk.) |
Standard No. |
AU@ 000048044646 |
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DEBBG BV039830334 |
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DEBBG BV042316750 |
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DEBSZ 434183520 |
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NZ1 15190069 |
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