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E-Book/E-Doc

Title Lithography [electronic resource] : principles, processes and materials / Theodore C. Hennessy, editor.

Imprint New York : Nova Science, c2011.

Copies

Location Call No. OPAC Message Status
 Axe ProQuest E-Book  Electronic Book    ---  Available
Description xii, 284 p. : ill. (some col.).
Series Engineering tools, techniques and tables
Nanotechnology science and technology
Engineering tools, techniques and tables.
Nanotechnology science and technology series.
Bibliography Includes bibliographical references and index.
Reproduction Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.
Subject Microlithography.
Microfabrication.
Genre/Form Electronic books.
Added Author Hennessy, Theodore C.
ProQuest (Firm)
ISBN 1617618373 (hardcover)
9781611221237
9781617618376 (hardcover)

 
    
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