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Microelectromechanical Systems Design And Construction
1
E-Book/E-Doc
 

Ceramic thick films for MEMS and microdevices


Dorey, Robert A.
Norwich, N.Y. : William Andrew ; Oxford : Elsevier Science [distributor], 2011. 2011

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 Axe Elsevier ScienceDirect Ebook  Electronic Book    ---  Available
2
E-Book/E-Doc
 

Fabrication and design of resonant microdevices


Bahreyni, Behraad.
Norwich, NY : W. Andrew Inc., ©2008. 2008

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 Axe Elsevier ScienceDirect Ebook  Electronic Book    ---  Available
3
E-Book/E-Doc
 

Handbook of wafer bonding



Weinheim, Germany : Wiley-VCH, 2012. 2012

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 Axe ProQuest E-Book  Electronic Book    ---  Available
4
E-Book/E-Doc
 

Inkjet-based micromanufacturing



Weinheim, Germany : Wiley-VCH, c2012. 2012

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 Axe ProQuest E-Book  Electronic Book    ---  Available
5
E-Book/E-Doc
 

Materials and failures in MEMS and NEMS



Salem, Massachusetts ; Hoboken, New Jersey : Scrivener Publishing : Wiley, 2015. 2015

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