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Microelectronics Industry
1
Beam technologies for integrated processing report of the Committee on Beam Technologies: Opportunit
National Research Council (U.S.). Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems.
Washington, D.C. : National Academy Press, 1992. 1992
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2
The handbook of nanotechnology business, policy, and intellectual property law
Hoboken, N.J. : John Wiley & Sons, c2005. 2005
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