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Subjects (1-8 of 8)
Microelectromechanical Systems Design And Construction
1
E-Book/E-Doc
 

Ceramic thick films for MEMS and microdevices


Dorey, Robert A.
Norwich, N.Y. : William Andrew ; Oxford : Elsevier Science [distributor], 2011. 2011

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2
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Fabrication and design of resonant microdevices


Bahreyni, Behraad.
Norwich, NY : W. Andrew Inc., ©2008. 2008

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3
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Handbook of wafer bonding



Weinheim, Germany : Wiley-VCH, 2012. 2012

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4
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Inkjet-based micromanufacturing



Weinheim, Germany : Wiley-VCH, c2012. 2012

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5
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Materials and failures in MEMS and NEMS



Salem, Massachusetts ; Hoboken, New Jersey : Scrivener Publishing : Wiley, 2015. 2015

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6
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Microelectromechanical systems advanced materials and fabrication methods


National Research Council (U.S.). Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems.
Washington, DC : National Academy Press, 1997. 1997

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7
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Microjoining and nanojoining



Cambridge, England : Woodhead Pub. and Maney Pub., on behalf of the Institute of Materials, Minerals & Mining ; Boca Raton : CRC Press, 2008. 2008

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8
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Resonant MEMS : fundamentals, implementation and application



Weinheim, Baden-Wurttemberg, Germany : Wiley-VCH, 2015. 2015

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