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E-Book/E-Doc
Author Kaariainen, Tommi.

Title Atomic layer deposition [electronic resource] : principles, characteristics, and nanotechnology applications / Tommi Kaariainen ... [et al.].

Imprint Hoboken, NJ : John Wiley & Sons, c2013.

Copies

Location Call No. OPAC Message Status
 Axe ProQuest E-Book  Electronic Book    ---  Available
Edition 2nd ed.
Description xv, 253 p. : ill.
Bibliography Includes bibliographical references and index.
Reproduction Electronic reproduction. Ann Arbor, MI : ProQuest, 2016. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.
Subject Chemical vapor deposition.
Epitaxy.
Microelectronics.
Nanotechnology.
Genre/Form Electronic books.
Added Author ProQuest (Firm)
ISBN 9781118062777 (cloth : alk. paper)
9781118747421 (electronic bk.)

 
    
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