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Author Sarkar, Jaydeep.

Title Sputtering materials for VLSI and thin film devices / by Jaydeep Sarkar.

Publication Info. Oxford ; Boston : William Andrew Publishing, 2014.


Location Call No. OPAC Message Status
 Axe ProQuest E-Book  Electronic Book    ---  Available
Edition First edition.
Description 1 online resource (614 pages) : illustrations
text rdacontent
computer rdamedia
online resource rdacarrier
Bibliography Includes bibliographical references and index.
Note Description based on print version record.
Subject Microelectronics -- Materials.
Flat panel displays -- Materials.
Sputtering (Physics)
Genre/Form Electronic books.
Other Form: Print version: Sarkar, Jaydeep. Sputtering materials for VLSI and thin film devices. Oxford : William Andrew Publishing, 2014 x, 603 pages : illustrations ; 24 cm. 9780815515937
ISBN 9780815519874 (e-book)
9780815515937 (hbk.)

Available items only