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Title Microelectromechanical systems [electronic resource] : advanced materials and fabrication methods / Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council.

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Washington, DC : National Academy Press, 1997.

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Available to Pittsburg State University patrons only.

Location	Call No.	OPAC Message	Status
Axe ProQuest E-Book	Electronic Book	---	Available

Description	xiv, 61 p. : ill.
Bibliography	Includes bibliographical references (p. 51-55).
Reproduction	Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.
Subject	Microelectronics -- Materials.
	Microelectromechanical systems -- Design and construction.
Genre/Form	Electronic books.
Added Author	ProQuest (Firm)
ISBN	0585002509 (electronic bk.)