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Subjects (1-4 of 4)
Microlithography
1
Handbook of VLSI microlithography : principles, technology, and applications
Park Ridge, N.J. : Noyes Publications ; Norwich, N.Y. : William Andrew Pub., ©2001. 2001
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Axe Elsevier ScienceDirect Ebook
Electronic Book
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2
Introduction to microlithography
Washington, DC : American Chemical Society, 1994. 1994
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Axe 2nd Floor Stacks
621.381531 In8, 1994
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3
Laser microfabrication : thin film processes and lithography
Boston : Academic Press, c1989. 1989
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Axe 2nd Floor Stacks
621.366 L3335
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4
Lithography main techniques
London : ISTE ; Hoboken, N.J. : Wiley, 2011. 2011
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Axe ProQuest E-Book
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