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Nanoelectromechanical Systems Design And Construction
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Glancing angle deposition of thin films : engineering the nanoscale


Hawkeye, Matthew M., author.
Chichester, England : Wiley, 2014. 2014

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2
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Materials and failures in MEMS and NEMS



Salem, Massachusetts ; Hoboken, New Jersey : Scrivener Publishing : Wiley, 2015. 2015

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