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Title
Plasma processing and processing science [electronic resource] / Panel on Plasma Processing, Naval Studies Board, Commission on Physical Sciences, Mathematics, and Applications, National Research Council.
Imprint
Washington, D.C. : National Academy Press, 1995.
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Available to Pittsburg State University patrons only.
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Status
Axe ProQuest E-Book
Electronic Book
---
Available
Description
x, 35 p.
Series
NRL strategic series
NRL strategic series.
Note
Committee chair: Francis F. Chen.
This work was performed under Department of Navy Contract N00014-93-C-0089 issued by the Office of Naval Research under contract authority NR 201-124.
Reproduction
Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.
Subject
Plasma engineering.
Semiconductors -- Etching.
Plasma etching.
Genre/Form
Electronic books.
Added Author
Chen, Francis F., 1929-
National Research Council (U.S.). Panel on Plasma Processing.
National Research Council (U.S.). Naval Studies Board.
National Research Council (U.S.). Commission on Physical Sciences, Mathematics, and Applications.
ProQuest (Firm)
ISBN
0309575168
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