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Plasma Etching
1
Print Material
 

Introduction to microlithography



Washington, DC : American Chemical Society, 1994. 1994

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Location Call No. OPAC Message Status
 Axe 2nd Floor Stacks  621.381531 In8, 1994    ---  Available
2
E-Book/E-Doc
 

Micromachining using electrochemical discharge phenomenon : fundamentals and applications of spark a


Wüthrich, Rolf.
Oxford, UK ; Burlington, MA : William Andrew, ©2009. 2009

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Location Call No. OPAC Message Status
 Axe Elsevier ScienceDirect Ebook  Electronic Book    ---  Available
3
E-Book/E-Doc
 

Plasma etching processes for CMOS device realization



London, UK : ISTE Press ; Kidlington, Oxford, UK : Elsevier, 2017. 2017

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 Axe Elsevier ScienceDirect Ebook  Electronic Book    ---  Available
4
E-Book/E-Doc
 

Plasma etching processes for interconnect realization in VLSI



London : ISTE Press ; Oxford : Elsevier Ltd, 2015. 2015

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 Axe Elsevier ScienceDirect Ebook  Electronic Book    ---  Available
5
E-Book/E-Doc
 

Plasma processing and processing science



Washington, D.C. : National Academy Press, 1995. 1995

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Location Call No. OPAC Message Status
 Axe ProQuest E-Book  Electronic Book    ---  Available
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