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Author
Wong, Terence K. S.
Title
Semiconductor strain metrology [electronic resource] : principles and applications / Terence K.S. Wong.
Imprint
[Saif Zone, Sharjah, U.A.E] ; Oak Park, IL : Bentham Science, [2012]
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Available to Pittsburg State University patrons only.
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Axe ProQuest E-Book
Electronic Book
---
Available
Description
136 p. : ill.
Bibliography
Includes bibliographical references and index.
Reproduction
Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.
Subject
Semiconductors -- Design and construction -- Materials.
Compound semiconductors -- Design and construction -- Materials.
Silicon-on-insulator technology.
Genre/Form
Electronic books.
Added Author
ProQuest (Firm)
ISBN
9781608053599
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