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Author
Reinhardt, Karen A.
Title
Handbook of cleaning for semiconductor manufacturing [electronic resource] : fundamentals and applications / Karen A. Reinhardt, Richard F. Reidy.
Imprint
Salem, Mass. ; Scrivener ; Hoboken, N.J. : John Wiley & Sons, Inc., c2011.
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Available to Pittsburg State University patrons only.
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Status
Axe ProQuest E-Book
Electronic Book
---
Available
Description
xxii, 590 p. : ill.
Bibliography
Includes bibliographical references and index.
Reproduction
Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.
Subject
Semiconductors -- Surfaces -- Cleaning.
Surface preparation.
Genre/Form
Electronic books.
Added Author
Reidy, Richard F., 1960-
ProQuest (Firm)
ISBN
0470625953
1118071743
9780470625958
9781118071731
9781118071748
Available items only
