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Record 6 of 26
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Author
Madou, Marc J., author.
Title
Fundamentals of microfabrication and nanotechnology. Volume III : from MEMS to bio-MEMS and bio-NEMS : manufacturing techniques and applications / Marc J. Madou.
Publication Info.
Boca Raton, Florida ; London, [England] ; New York : CRC Press, 2011.
2011
Connect to
Available to Pittsburg State University patrons only.
Copies
Location
Call No.
OPAC Message
Status
Axe ProQuest E-Book
Electronic Book
---
Available
Edition
Third edition.
Description
1 online resource (642 pages) : illustrations (some color), tables
text rdacontent
computer rdamedia
online resource rdacarrier
Bibliography
Includes bibliographical references at the end of each chapters.
Note
Description based on print version record.
Subject
Microelectromechanical systems.
Nanoelectromechanical systems.
Microfluidics.
Solid state physics.
Genre/Form
Electronic books.
Other Form:
Print version: Madou, Marc J. Fundamentals of microfabrication and nanotechnology. Volume III. Third edition. Boca Raton, Florida ; London, [England] ; New York : CRC Press, c2011 xiii, 626 pages 9781420055160 2011014406
ISBN
9781420055160
9781439895245 (electronic bk.)
Available items only
