| Description |
1 online resource (xxii, 914 pages) : illustrations |
|
text txt rdacontent |
|
computer c rdamedia |
|
online resource cr rdacarrier |
| Series |
Materials science and process technology series. Electronic materials and process technology |
|
Materials science and process technology series. Electronic materials and process technology.
|
| Summary |
This book reviews the advances and technologies used to produce microelectronic and optoelectronic devices from compound semiconductors. It provides an overview of the technologies necessary to grow bulk single-crystal substrates, grow hetero-or homoepitaxial films, and process advanced devices such as HBT's, QW diode lasers, etc. |
| Bibliography |
Includes bibliographical references and index. |
| Contents |
Bulk Crystal Growth -- MOCVD of Compound Semiconductor Layers -- Molecular Beam Epitaxy -- Physical and Chemical Deposition of Metals as Ohmic Contacts to InP and Related Materials -- Surface Processing of III-V Semiconductors -- Ion Implantation Induced Extended Defects in GaAs -- Passivation of GaAs and InP -- Wet and Dry Etching of Compound Semiconductors -- Rapid Isothermal Processing (RIP) -- Epitaxial Lift-Off for Thin Film Compound Semiconductor Devices -- Packaging -- Chemical, Structural and Electronic Characterization of Compound Semiconductor Surfaces and Interfaces by X-ray Photoelectron Spectroscopy and Diffraction Techniques -- Characterization of Compound Semiconductor Material by Ion Beams -- Optical Characterization of Compound Semiconductors -- Gallium Arsenide Microelectronic Devices and Circuits -- Optoelectronic Devices -- Acknowledgments -- References -- Index. |
| Access |
Use copy Restrictions unspecified star MiAaHDL |
| Reproduction |
Electronic reproduction. [Place of publication not identified] : HathiTrust Digital Library, 2010. MiAaHDL |
| System Details |
Master and use copy. Digital master created according to Benchmark for Faithful Digital Reproductions of Monographs and Serials, Version 1. Digital Library Federation, December 2002. http://purl.oclc.org/DLF/benchrepro0212 MiAaHDL |
| Processing Action |
digitized 2010 HathiTrust Digital Library committed to preserve pda MiAaHDL |
| Note |
Print version record. |
| Language |
English. |
| Subject |
Compound semiconductors -- Handbooks, manuals, etc.
|
|
Composés semi-conducteurs -- Guides, manuels, etc.
|
|
TECHNOLOGY & ENGINEERING -- Electronics -- Solid State.
|
|
TECHNOLOGY & ENGINEERING -- Electronics -- Semiconductors.
|
|
Compound semiconductors
|
| Genre/Form |
Electronic books.
|
|
Handbook |
|
handbooks.
|
|
Handbooks and manuals
|
|
Handbooks and manuals.
|
|
Guides et manuels.
|
| Added Author |
Holloway, Paul H.
|
|
McGuire, G. E.
|
| Other Form: |
Print version: Handbook of compound semiconductors. Park Ridge, N.J., U.S.A. : Noyes Publications, ©1995 0815513747 (DLC) 95021540 |
| ISBN |
9780815517443 (electronic bk.) |
|
0815517440 (electronic bk.) |
|
1591240808 (electronic bk.) |
|
9781591240808 (electronic bk.) |
|
9780080946146 (e-book) |
|
0080946143 (e-book) |
|
1282769286 |
|
9781282769281 |
|
9786612769283 |
|
6612769289 |
|
1282002600 |
|
9781282002609 |
|
9786612002601 |
|
6612002603 |
|
9780815513742 |
|
0815513747 |
| Standard No. |
AU@ 000025337038 |
|
CHNEW 001004438 |
|
DEBBG BV042315358 |
|
DEBSZ 338255192 |
|
DEBSZ 405321651 |
|
GBVCP 878882995 |
|
NZ1 10240210 |
|
NZ1 14675006 |
|
NZ1 15177247 |
|
NZ1 15920392 |
|
