| Description |
1 online resource (xiv, 518 pages) : illustrations |
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text txt rdacontent |
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computer c rdamedia |
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online resource cr rdacarrier |
| Bibliography |
Includes bibliographical references and index. |
| Note |
Print version record. |
| Contents |
Thin Film Materials and Devices -- Thin Film Process -- Sputtering Phenomena -- Sputtering Systems -- Deposition of Compound Thin Films -- Structural Control of Compound Thin Films -- Microfabrication by Sputtering -- Appendices -- Index. |
| Summary |
An invaluable resource for industrial science and engineering newcomers to sputter deposition technology in thin film production applications, this book is rich in coverage of both historical developments and the newest experimental and technological information about ceramic thin films, a key technology for nano-materials in high-speed information applications and large-area functional coating such as automotive or decorative painting of plastic parts, among other topics. In seven concise chapters, the book thoroughly reviews basic thin film technology and deposition processes, sputtering processes, structural control of compound thin films, and microfabrication by sputtering. |
| Language |
English. |
| Subject |
Cathode sputtering (Plating process)
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Thin films.
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Pulvérisation cathodique -- Applications industrielles.
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Couches minces.
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TECHNOLOGY & ENGINEERING -- Electronics -- Solid State.
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TECHNOLOGY & ENGINEERING -- Electronics -- Semiconductors.
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Cathode sputtering (Plating process)
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Thin films
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| Added Author |
Kitabatake, Makoto.
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Adachi, Hideaki.
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| Other Form: |
Print version: Wasa, Kiyotaka. Thin film materials technology. Norwich, NY : William Andrew Pub. ; Heidelberg : Springer, ©2004 0815514832 (DLC) 2003018016 (OCoLC)52886812 |
| ISBN |
0815514832 (electronic bk.) |
|
9780815514831 (electronic bk.) |
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9783540211181 |
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3540211187 |
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9780815519317 (electronic bk.) |
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0815519311 (electronic bk.) |
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1282027662 |
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9781282027664 |
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9786612027666 |
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6612027665 |
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0080946984 |
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9780080946986 |
| Standard No. |
9780815514831 |
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AU@ 000026328761 |
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DEBBG BV039834689 |
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DEBBG BV042317143 |
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DEBSZ 275224805 |
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DEBSZ 405321996 |
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DEBSZ 430723687 |
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NZ1 10240763 |
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NZ1 12767684 |
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NZ1 13329522 |
|
NZ1 15192772 |
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