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Title Nanolithography and patterning techniques in microelectronics / edited by David G. Bucknall.

Imprint Cambridge : Woodhead Pub. ; Boca Raton, FL : CRC Press, ©2005.

Copies

Location Call No. OPAC Message Status
 Axe Elsevier ScienceDirect Ebook  Electronic Book    ---  Available
Description 1 online resource (xiv, 409 pages) : illustrations.
text txt rdacontent
computer c rdamedia
online resource cr rdacarrier
data file rda
Series Woodhead Publishing in materials
Woodhead Publishing in materials.
Bibliography Includes bibliographical references and index.
Note Print version record.
Contents Prelium; Contents; Block copolymer nanolithography; Surface-induced structure formation of polymer blends; Rapid prototyping of functional microfabricated devices by soft lithography; Chemomechanical surface modification of materials for patterning; Patterning of polymer thin films; Ion beam patterning; Nanofabrication by shadow deposition through nanostencils; Photolithography beyond the diffraction limit; Ink-jet printing as a tool in manufacturing and instrumentation; Actuators and patterns for microfluidic control; Manipulation of biomolecules and reactions.
Summary Currently surface patterning is achieved by means of optical lithographic techniques but with industry moving towards the fabrication of devices with size features of 100 nm less, the technological community is looking for alternative approaches to materials fabrication at the nanoscale. By using nanolithography scientists can drive patterning currents through surfaces while building a 3D structure from a series of patterned layers. Electron induced chemical lithography can create ultra-high resolution templates for the site selective immobilisation of molecules, to form functional, hierarchic.
Access Online access available only to subscribers.
Language English.
Subject Microlithography.
Nanotechnology.
Microlithographie.
Nanotechnologie.
TECHNOLOGY & ENGINEERING -- Electronics -- Circuits -- General.
Microlithography
Nanotechnology
Electrical Engineering.
Electrical & Computer Engineering.
Engineering & Applied Sciences.
Nanotecnologia.
Added Author Bucknall, David G.
Other Form: Print version: Nanolithography and patterning techniques in microelectronics. Cambridge : Woodhead Pub. ; Boca Raton, FL : CRC Press, ©2005 1855739313 (DLC) 2006365086 (OCoLC)65821690
ISBN 9781615831869 (electronic bk.)
161583186X (electronic bk.)
9781855739314
1855739313
1845690907 (electronic bk.)
9781845690908 (electronic bk.)
0849334470
9780849334474
128056833X
9781280568336
9786610568338
6610568332
Standard No. 9781855739314
978845690908 (e-book)
AU@ 000046687050
DEBBG BV042316887
DEBSZ 318256754
DEBSZ 414259246
HEBIS 212697099
NZ1 12038099
NZ1 12046861
NZ1 14232073
NZ1 15619733

 
    
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