| Description |
1 online resource : illustrations |
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text txt rdacontent |
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computer c rdamedia |
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online resource cr rdacarrier |
| Series |
Woodhead Publishing series in electronic and optical materials ; 51 |
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Woodhead Publishing series in electronic and optical materials ; 51.
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| Bibliography |
Includes bibliographical references and index. |
| Summary |
Smart sensors and MEMS can include a variety of devices and systems that have a high level of functionality. They do this either by integrating multiple sensing and actuating modes into one device, or else by integrating sensing and actuating with information processing, analog-to-digital conversion and memory functions. Part one outlines the industrial applications for smart sensors, covering direct interface circuits for sensors, capacitive sensors for displacement measurement in the sub-nanometer range, integrated inductive displacement sensors for harsh industrial environments, advanced silicon radiation detectors in the vacuum ultraviolet (VUV) and extreme ultraviolet (EUV) spectral range, and advanced optical incremental sensors (encoders and interferometers), among other topics. The second part of the book describes the industrial applications of smart micro-electro-mechanical systems (MEMS). Some of the topics covered in this section include microfabrication technologies used for creating smart devices for industrial applications, microactuators, dynamic behaviour of smart MEMS in industrial applications, MEMS integrating motion and displacement sensors, MEMS print heads for industrial printing, Photovoltaic and fuel cells in power MEMS for smart energy management, and radio frequency (RF)-MEMS for smart communication microsystems. Smart sensors and MEMS is invaluable reference for academics, materials scientists and electrical engineers working in the microelectronics, sensors and micromechanics industry, and engineers looking for industrial sensing, monitoring and automation solutions. Outlines industrial applications for smart sensors and smart MEMSCovers smart sensors including capacitive, inductive, resistive and magnetic sensors and sensors to detect radiation and measure temperatureCovers smart MEMS including power MEMS, radio frequency MEMS, optical MEMS, inertial MEMS, and microreaction chambers. |
| Note |
Print version record. |
| Contents |
Cover; Smart sensors and MEMS: Intelligent devices and microsystems for industrial applications; Copyright; Contents; Contributor contact details; Woodhead Publishing Series in Electronic and Optical Materials; Preface; Part I Smart sensors for industrial applications; 1 What makes sensor devices and microsystems 'intelligent' or 'smart'?; 1.1 Introduction; 1.2 Interpretation of terms related to sensors; 1.3 Key trends in the development of sensors (sensor devices) and MEMS; 1.4 Suggestions for improving terminology in the field; 1.5 Conclusion; 1.6 Acknowledgment; 1.7 References. |
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2 Direct interface circuits for sensors2.1 Introduction; 2.2 Sensors; 2.3 Microcontrollers; 2.4 Interface circuits; 2.5 Applications; 2.6 Future trends; 2.7 Sources of further information and advice; 2.8 References; 3 Capacitive sensors for displacement measurement in the sub-nanometer range; 3.1 Introduction; 3.2 Challenges for sub-nanometer displacement measurement with capacitive sensors; 3.3 Offset capacitance cancellation technique; 3.4 Capacitance-to-digital converter (CDC) with offset capacitance cancellation and calibration functions; 3.5 Conclusion; 3.6 References. |
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4 Integrated inductive displacement sensors for harsh industrial environments4.1 Introduction; 4.2 Principles of operation and practical limitations for eddy-current sensors (ECSs); 4.3 Design requirements in precision industrial applications; 4.4 State-of-the-art ECS interfaces; 4.5 ECS interfaces with an LC oscillator and ratiometric measurement; 4.6 Conclusion; 4.7 References; 5 Advanced silicon radiation detectors in the vacuum ultraviolet (VUV) and the extreme ultraviolet (EUV) spectral range; 5.1 Introductory overview. |
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5.2 Challenges for radiation detection in the EUV and VUV spectral ranges5.3 Device solutions for radiation detection in the EUV and VUV spectral ranges; 5.4 Methods of radiometric investigation and characterization; 5.5 Spectral responsivity and radiation hardness of EUV and VUV radiation detectors; 5.6 Future trends; 5.7 References; 6 Integrated polarization analyzing CMOS image sensors for detection and signal processing; 6.1 Introduction; 6.2 Polarization vision; 6.3 Polarization cameras; 6.4 Design of a polarization sensor. |
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6.5 Polarization vision in machine vision applications: material classification6.6 Conclusion; 6.7 References; 7 Advanced interfaces for resistive sensors; 7.1 Introduction; 7.2 Resistive sensors; 7.3 Voltamperometric resistance estimation; 7.4 Resistance-to-time conversion methods; 7.5 Conclusion and future trends; 7.6 References; 8 Reconfigurable ultrasonic smart sensor platform for nondestructive evaluation and imaging applications; 8.1 Introduction; 8.2 Fundamentals of ultrasonic sensing and pulse-echo measurements; 8.3 Reconfigurable ultrasonic smart sensor platform (RUSSP) design. |
| Subject |
Detectors -- Industrial applications.
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Microelectromechanical systems -- Industrial applications.
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Microsystèmes électromécaniques -- Applications industrielles.
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TECHNOLOGY & ENGINEERING -- Technical & Manufacturing Industries & Trades.
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Detectors -- Industrial applications
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| Added Author |
Nihtianov, S., editor.
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Luque, A. (Antonio), editor.
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| Added Title |
Smart sensors and microelectromechanical systems |
| Other Form: |
Print version: Smart sensors and mems. Oxford, UK : Woodhead Publishing, 2013 9780857095022 |
| ISBN |
9780857099297 (electronic bk.) |
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0857099299 (electronic bk.) |
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1306540933 (electronic bk.) |
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9781306540933 (electronic bk.) |
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0857095021 (electronic bk.) |
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9780857095022 (electronic bk.) |
| Standard No. |
AU@ 000055964941 |
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CHBIS 010295242 |
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CHVBK 327764589 |
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DEBBG BV042300153 |
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DEBSZ 406904944 |
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DEBSZ 431680833 |
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