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Author Robertson, Max.

Title Substrate surface preparation handbook / Max Robertson.

Imprint Boston : Artech House, 2012.


Location Call No. OPAC Message Status
 Axe Books 24x7 Engineering E-Book  Electronic Book    ---  Available
Description 1 online resource (195 pages) : illustrations.
text txt rdacontent
computer c rdamedia
online resource cr rdacarrier
data file rda
Series Artech House applied photonics series
Artech House applied photonics series.
Bibliography Includes bibliographical references and index.
Contents Introduction -- Preparation : before the start -- Lapping -- Polishing -- Specific processes and materials -- Specialized techniques -- Surface finish -- Optics -- Semiconductor device Deconstruction -- Metallurgical Polishing and Microscopy -- Laboratory Setup -- Using Interferometry.
Summary "Substrate Surface Preparation Handbook serves as a practical, one-stop reference, covering the technologies developed to produce flat surfaces with nanometer accuracy for the subsequent building of semiconductor devices and integrated circuits. This hands-on resource offers you detailed guidance in the entire substrate surface preparation process, from lapping and polishing ... to specialized techniques and surface finishing. Supported with over 125 illustrations, this unique book provides you with a complete understanding of important maintenance methods and the full range of equipment available in the field. You gain the know-how and confidence you need to produce desired results when processing a sample of new material, rather than wasting time and money on a trial and error approach. Moreover, this authoritative book presents in-depth discussions on key applications, such as optics production and semiconductor de-lamination and deconstruction."-- Unedited summary from book.
Subject Optical materials -- Surfaces.
Glass grinding and polishing.
Glass grinding and polishing. (OCoLC)fst00943170
Optical materials -- Surfaces. (OCoLC)fst01046773
Genre/Form Electronic books.
ISBN 9781608072149 (e-book)
1608072142 (e-book)
Standard No. AU@ 000051446744
DEBSZ 372890830
NZ1 15023972

Available items only