| Description |
1 online resource (xx, 445 pages) : illustrations |
|
text txt rdacontent |
|
computer c rdamedia |
|
online resource cr rdacarrier |
| Series |
Materials science and process technology series. Electronic materials and process technology |
|
Materials science and process technology series. Electronic materials and process technology.
|
| Bibliography |
Includes bibliographical references and index. |
| Summary |
This book describes the design, physics, and performance of high density plasma sources which have been extensively explored in low pressure plasma processing, such as plasma etching and planarization, plasma enhanced chemical vapor deposition of thin films, sputtered deposition of metals and dielectrics, epitaxial growth of silicon and GaAs, and many other applications. This is a comprehensive survey and a detailed description of most advanced high density plasma sources used in plasma processing. |
| Note |
Print version record. |
| Contents |
Helicon Plasma Sources -- Planar Inductive Sources -- Electrostatically-Shielded Inductively-Coupled RF Plasma Sources -- Very High Frequency Capacitive Plasma Sources -- Surface Wave Plasma Sources -- Microwave Plasma Disk Processing Machines -- Electron Cyclotron Resonance Plasma Sources -- Distributed ECR Plasma Sources -- References -- Index. |
| Language |
English. |
| Subject |
Plasma density.
|
|
High temperature plasmas.
|
|
Plasma generators.
|
|
Plasma (Gaz ionisés) -- Densité.
|
|
Plasmas chauds.
|
|
Générateurs de plasma.
|
|
TECHNOLOGY & ENGINEERING -- Mechanical.
|
|
High temperature plasmas
|
|
Plasma density
|
|
Plasma generators
|
| Added Author |
Popov, Oleg A.
|
| Other Form: |
Print version: High density plasma sources. Park Ridge, N.J. : Noyes Publications, ©1995 0815513771 (DLC) 95004918 (OCoLC)32666280 |
| ISBN |
1591240638 (electronic bk.) |
|
9781591240631 (electronic bk.) |
|
9780815513773 |
|
0815513771 |
|
9780080946160 (e-book) |
|
008094616X (e-book) |
|
9780815517887 (electronic bk.) |
|
0815517882 (electronic bk.) |
|
1282755080 |
|
9781282755086 |
|
9786612755088 |
|
6612755083 |
|
1282253212 |
|
9781282253216 |
|
9786612253218 |
|
6612253215 |
|
0815517890 |
|
9780815517894 |
|
9780815517894 |
| Standard No. |
(WaSeSS)ssj0000072289 |
|
AU@ 000025337009 |
|
CHNEW 001004480 |
|
DEBBG BV042304207 |
|
DEBSZ 338255532 |
|
DEBSZ 405321724 |
|
NZ1 10240180 |
|
NZ1 15188519 |
|
