| Description |
1 online resource (xxvii, 917 pages) : illustrations |
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text txt rdacontent |
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computer c rdamedia |
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online resource cr rdacarrier |
| Summary |
Covers aspects of the Physical Vapor Deposition process technology from characterizing and preparing the substrate material, through deposition processing and film characterization, to post-deposition processing. Includes subjects such as substrate characterization, adhesion, cleaning, and processing. Also covers the more widely discussed subjects of vacuum technology and the fundamentals of individual deposition processes. |
| Bibliography |
Includes bibliographical references and index. |
| Note |
Print version record. |
| Contents |
Introduction -- Substrate (""Real"") Surfaces and Surface Modification -- The Low-Pressure Gas and Vacuum Processing Environment -- The Low-Pressure Plasma Processing Environment -- Vacuum Evaporation and Vacuum Deposition -- Physical Sputtering and Sputter Deposition (Sputtering) -- Arc Vapor Deposition -- Ion Plating and Ion Beam Assisted Deposition -- Atomistic Film Growth and Some Growth-Related Film Properties -- Film Characterization and Some Basic Film Properties -- Addhesion and Deadhesion -- Cleaning -- External Processing Environment -- APPENDIX 1: Reference Material -- APPENDIX 2: Transfer of Technology from R & D to Manufacturing -- Glossary of Terms and Acronyms Used in Surface Engineering. |
| Language |
English. |
| Subject |
Vapor-plating -- Handbooks, manuals, etc.
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Vapor-plating
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Galvanoplastia.
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Manuais.
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| Genre/Form |
Handbook |
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handbooks.
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Handbooks and manuals
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Handbooks and manuals.
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Guides et manuels.
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| Other Form: |
Print version: Mattox, D.M. Handbook of physical vapor deposition (PVD) processing. Westwood, N.J. : Noyes Publications, ©1998 0815514220 (DLC) 97044664 (OCoLC)37806270 |
| ISBN |
1591240794 (electronic bk.) |
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9781591240792 (electronic bk.) |
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9780815514220 |
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0815514220 |
| Standard No. |
(WaSeSS)ssj0000072232 |
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AU@ 000025336997 |
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CHNEW 001004476 |
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DEBBG BV039828130 |
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DEBBG BV042304515 |
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DEBSZ 338255478 |
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DEBSZ 405321104 |
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NZ1 10240166 |
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NZ1 15188510 |
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NZ1 15595943 |
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