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Materials Microelectromechanical Systems
1
Handbook of silicon based MEMS materials and technologies
London, UK : William Andrew is an imprint of Elsevier, 2015. 2015
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Axe Elsevier ScienceDirect Ebook
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Handbook of silicon based MEMS : materials & technologies
Norwich, N.Y. : William Andrew ; Oxford : Elsevier Science [distributor], 2010. 2010
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