| Edition |
2nd ed. |
| Description |
1 online resource (xxi, 1001 pages) : illustrations |
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text txt rdacontent |
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computer c rdamedia |
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online resource cr rdacarrier |
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data file |
| Series |
Materials science and process technology series. Electronic materials and process technology |
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Materials science and process technology series. Electronic materials and process technology.
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| Summary |
This handbook gives readers a look at the technology of printing very high resolution and high density integrated circuit (IC) patterns into thin resist process transfer coatings - including optical lithography, electron beam, ion beam, and X-ray lithography. The book's main theme is the special printing process needed to achieve volume high density IC chip production, especially in the Dynamic Random Access Memory (DRAM) industry. The book leads off with a comparison of various lithography methods, covering the three major patterning parameters of line/space, resolution, line edge, and pattern feature dimension control. The book's explanation of resist and resist process equipment technology describes the relationship between the resist process and equipment parameters. The basics of resist technology are also covered - including an entire chapter on resist process defectivity and the potential yield limiting effect on device production. |
| Bibliography |
Includes bibliographical references and index. |
| Note |
Print version record. |
| Contents |
Issues and Trends Affecting Lithography Tool Selection Strategy -- Resist Technology: Design, Processing and Applications -- Lithography Process Monitoring and Defect Detection -- Techniques and Tools for Photo Metrology -- Techniques and Tools for Optical Lithography -- Microlithography Tool Automation -- Electron Beam ULSI Applications -- Rational Vibration and Structural Dynamics for Lithographic Tool Installations -- Applications of Ion Microbeam Lithography and Direct Processing -- X-Ray Lithography. |
| Access |
Use copy Restrictions unspecified star MiAaHDL |
| Reproduction |
Electronic reproduction. [Place of publication not identified] : HathiTrust Digital Library, 2010. MiAaHDL |
| System Details |
Master and use copy. Digital master created according to Benchmark for Faithful Digital Reproductions of Monographs and Serials, Version 1. Digital Library Federation, December 2002. http://purl.oclc.org/DLF/benchrepro0212 MiAaHDL |
| Processing Action |
digitized 2010 HathiTrust Digital Library committed to preserve pda MiAaHDL |
| Subject |
Integrated circuits -- Very large scale integration.
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Microlithography.
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Circuits intégrés à très grande échelle.
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Microlithographie.
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TECHNOLOGY & ENGINEERING -- Electronics -- Circuits -- General.
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Integrated circuits -- Very large scale integration
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Microlithography
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| Genre/Form |
Handbook |
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handbooks.
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Handbooks and manuals
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Handbooks and manuals.
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Guides et manuels.
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| Added Author |
Helbert, John N.
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| Other Form: |
Print version: Handbook of VLSI microlithography. 2nd ed. Park Ridge, N.J. : Noyes Publications ; Norwich, N.Y. : William Andrew Pub., ©2001 0815514441 (DLC) 00028173 (OCoLC)43591143 |
| ISBN |
1591242754 (electronic bk.) |
|
9781591242758 (electronic bk.) |
|
9780815517801 (electronic bk.) |
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0815517807 (electronic bk.) |
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9786611411763 |
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6611411763 |
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9780815514442 |
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0815514441 |
| Standard No. |
(WaSeSS)ssj0000168545 |
|
AU@ 000025337210 |
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CHNEW 001004469 |
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DEBBG BV039832761 |
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DEBBG BV042315371 |
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DEBSZ 338255346 |
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DEBSZ 405321708 |
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GBVCP 878883010 |
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NZ1 10240385 |
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NZ1 15909299 |
|
