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Microlithographie
1
Handbook of VLSI microlithography : principles, technology, and applications
Park Ridge, N.J. : Noyes Publications ; Norwich, N.Y. : William Andrew Pub., ©2001. 2001
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Axe Elsevier ScienceDirect Ebook
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2
Materials and Processes for Next Generation Lithography.
Amsterdam, Netherlands : Elsevier, 2016. 2016
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3
Nanolithography and patterning techniques in microelectronics
Cambridge : Woodhead Pub. ; Boca Raton, FL : CRC Press, ©2005. 2005
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