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Title Material science and MEMS production : selected, peer reviewed papers from the 2014 Conference on MEMS and Nanotechnology (MEMS-NANO 2014), January 23-24, 2014, Shenzhen, China / edited by Changhui Liu.

Publication Info. Zurich, Switzerland : TTP, 2014.
2014

Copies

Location Call No. OPAC Message Status
 Axe ProQuest E-Book  Electronic Book    ---  Available
Description 1 online resource (117 pages) : illustrations (some color), graphs, photographs.
text rdacontent
computer rdamedia
online resource rdacarrier
Series Advanced Materials Research, 1662-8985 ; Volume 901
Advanced materials research ; Volume 901.
Bibliography Includes bibliographical references at the end of each chapters and indexes.
Note Description based on online resource; title from PDF title page (ebrary, viewed March 20, 2014).
Subject Microelectromechanical systems -- Congresses.
Nanotechnology -- Congresses.
Genre/Form Electronic books.
Added Author Liu, Changhui, editor.
Other Form: Print version: Material science and MEMS production : selected, peer reviewed papers from the 2014 Conference on MEMS and Nanotechnology (MEMS-NANO 2014), January 23-24, 2014, Shenzhen, China. Zurich, Switzerland : TTP, c2014 120 pages Advanced materials research ; Volume 901. 9783038350477
ISBN 9783038350477
9783038264286 (electronic bk.)

 
    
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