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Title Epitaxial silicon technology / edited by B. Jayant Baliga.

Imprint

Orlando, Fla. : Academic Press, 1986.

Location	Call No.	OPAC Message	Status
Axe 2nd Floor Stacks	621.38152 Ep47	---	Available

Description	viii, 328 p. : ill. ; 24 cm.
Note	Includes bibliographical references and index.
Contents	Silocon vapor phase epitaxy / H. M. Liaw and J. W. Rose -- Silicon molecular beam epitaxy / S. S. Iyer -- Silicon liquid phase expitaxy / B. Jayant Baliga -- Silicon on sapphire heteroepitaxy / P. K. Vasudev -- Silicon-on-insulator epitaxy / H. W. Lam.
Subject	Semiconductors -- Design and construction.
	Silicon crystals -- Growth.
	Epitaxy.
Added Author	Baliga, B. Jayant, 1948-
ISBN	0120771209