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Author
Graff, Klaus, 1931- author.
Title
Metal impurities in silicon-device fabrication / Klaus Graff.
Publication Info.
Berlin, [Germany] ; Heidelberg, [Germany] : Springer, 1995.
1995
Connect to
Available to Pittsburg State University patrons only.
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Location
Call No.
OPAC Message
Status
Axe ProQuest E-Book
Electronic Book
---
Available
Description
1 online resource (227 pages) : illustrations.
text rdacontent
computer rdamedia
online resource rdacarrier
Series
Springer Series in Materials Science ; 24
Springer series in materials science ; 24.
Bibliography
Includes bibliographical references and index.
Note
Description based on print version record.
Subject
Semiconductors -- Defects.
Silicon -- Inclusions.
Silicon -- Defects.
Genre/Form
Electronic books.
Other Form:
Print version: Graff, Klaus, 1931- Metal impurities in silicon-device fabrication. Berlin, [Germany] ; Heidelberg, [Germany] : Springer, c1995 ix, 216 pages Springer series in materials science ; 24. 9783642975950 94024599
ISBN
9783642975950
9783642975936 (e-book)
Available items only
