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Title Handbook of silicon based MEMS materials and technologies [electronic resource] / [edited by] Veikko Lindroos ... [et al.].

Imprint Oxford, U.K. ; Burlington, Mass. : William Andrew, 2010 (Norwood, Mass. : [generator])


Location Call No. OPAC Message Status
 Axe Engineering Pro E-Book  Electronic Book    ---  Available
Edition 1st ed.
Series Micro & nano technologies series
Micro & nano technologies.
System Details Mode of access: Internet via World Wide Web.
Note Title from title screen.
File Type Text.
Issued By Digitized and made available by:
Form Available also in a print ed.
Bibliography Includes bibliographical references and index.
Subject Microelectromechanical systems -- Materials -- Handbooks, manuals, etc.
Nanosilicon -- Handbooks, manuals, etc.
Silicon -- Handbooks, manuals, etc.
Microelectromechanical systems -- Handbooks, manuals, etc.
Genre/Form Electronic books.
Added Author Lindroos, Veikko. Editor.
Books24x7, Inc.
Added Title Handbook of silicon based microelectromechanical systems materials and technologies
ISBN 9780815515944

Available items only