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Corporate Author National Research Council (U.S.). Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems.

Title Beam technologies for integrated processing [electronic resource] : report of the Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council.

Imprint Washington, D.C. : National Academy Press, 1992.

Copies

Location Call No. OPAC Message Status
 Axe ProQuest E-Book  Electronic Book    ---  Available
Description xii, 89 p. : ill.
Note "NMAB-461."
Bibliography Includes bibliographical references.
Reproduction Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.
Subject Microelectronics industry.
Molecular beams -- Industrial applications.
Microelectronics -- Materials.
Plasma-enhanced chemical vapor deposition -- Industrial applications.
Genre/Form Electronic books.
Added Author ProQuest (Firm)
ISBN 0309046351

 
    
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