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Corporate Author National Research Council (U.S.). Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems.

Title Microelectromechanical systems [electronic resource] : advanced materials and fabrication methods / Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council.

Imprint Washington, DC : National Academy Press, 1997.

Copies

Location Call No. OPAC Message Status
 Axe ProQuest E-Book  Electronic Book    ---  Available
Description xiv, 61 p. : ill.
Bibliography Includes bibliographical references (p. 51-55).
Reproduction Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.
Subject Microelectronics -- Materials.
Microelectromechanical systems -- Design and construction.
Genre/Form Electronic books.
Added Author ProQuest (Firm)
ISBN 0585002509 (electronic bk.)

 
    
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